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학술저널
저자정보
손승현 (연세대학교) 황윤후 (연세대학교) 이희장 (씰링크) 김대은 (연세대학교)
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한국트라이볼로지학회 Tribology and Lubricants Tribology and Lubricants 제41권 제1호
발행연도
2025.2
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1 - 8 (8page)

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This study investigates the tribological characteristics of PTFE/PI composite pins and ceramic-coated shafts under high-temperature conditions critical for precision components in semiconductor and display equipment. Lubricant-free, high-vacuum environments pose challenges in minimizing friction and wear, especially for seals and shafts that maintain vacuum integrity under thermal stress. Although PTFE/PI composites exhibit high hardness and heat resistance, their wear performance with ceramic-coated shafts remains underexplored. We employ a pin-on-cylinder setup to analyze friction and wear behavior and examines wear track morphology with a 3D confocal laser microscope. Results reveal that the friction coefficients of SUS304 and ceramic-coated shafts decrease with increasing temperature. Particle formation on SUS304 influences their tribological performance, resulting in abrasive wear. In contrast, the wear of ceramic coatings depend on their hardness. The surface condition of Cr₂O₃ coatings, including porosity, causes localized stress concentration, which accelerates wear. Al₂O₃- TiO2 coatings exhibit superior wear resistance at high temperatures due to their hardness and thermal stability, whereas Cr₂O₃ exhibits relatively higher wear rates due to lower hardness. However, Cr₂O₃ coatings cause less wear on PTFE/PI composite pins compared to Al₂O₃-TiO₂ coatings, attributable to lower contact pressure and smoother surface roughness. These findings provide insights into material and coating selection for high-temperature applications, enhancing the durability and reliability of vacuum seals and other advanced machinery components that operate under harsh conditions.

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Abstract
1. 서론
2. 연구방법 및 내용
3. 실험 결과
4. 마모율 및 마모 트랙 분석
5. 결론
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