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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.24 No.6
- 발행연도
- 2015.11
- 수록면
- 250 - 253 (4page)
이용수
초록· 키워드
오류제보하기
High contrast grating (HCG) is the structure made up of the sub-wavelength grating of high-index and the surrounding layer of low-index, which reveals high contrast between two materials. Its advantages include high reflectivity over a broad bandwidth, polarization and wavelength selectivity, optical high-Q resonator, and phase modulation. In this work, the HCG structure comprising of indium tin oxide (ITO) and Silicon (Si), for the surrounding layer and the grating layer respectively, was studied. Its theoretical model was established, and transmittance, phase and optical behavior were calculated by rigorous coupled-wave analysis and finite element method. Furthermore, the established structure was fabricated to validate its feasibility. The fabricated structure shows the focusing capability whose length is about 10 μm, and the feasibility of the structure was demonstrated. It is also meaningful that ITO layer can contribute to the fabrication of the HCG structure, leading to enable the structure to be electrical-driven.
목차
Abstract
Ⅰ. Introduction
Ⅱ. Theoretical Method and Experimental
Ⅲ. Results and Discussions
Ⅳ. Conclusions
References
참고문헌 (14)
참고문헌 신청
[학술지(정기간행물)] - C. F. R. Mateus / 2004 / Broad-band mirror (1.12-1.62 μm) using a sub-wavelength grating / IEEE Photon. Tech. Lett 16 (7) : 1676 ~ 1678
[학술지(정기간행물)] - Chang-Hasnain C. J / 2009 / Highcontrast grating VCSELs / IEEE J. Sel. Top. Quantum Electron 15 : 869 ~ 878
[학술지(정기간행물)] - Karagodsky V, Pesala B / 2010 / / J Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings Opt. Express 18 : 694 ~ 699
[학술지(정기간행물)] - Zhou Y / 2009 / High-indexcontrast grating (HCG) and its applications in optoelectronic devices / IEEE J. Sel. Top. Quantum Electron 15 : 1485 ~ 1499
[학술지(정기간행물)] - D. Fattal / 2010 / Flat dielectric grating reflectors with focusing abilities / Nat. Photon 4 : 466 ~ 470
[학술지(정기간행물)] - Chang-Hasnain C. J / 2009 / Highcontrast grating VCSELs / IEEE J. Sel. Top. Quantum Electron 15 : 869 ~ 878
[학술지(정기간행물)] - Karagodsky V, Pesala B / 2010 / / J Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings Opt. Express 18 : 694 ~ 699
[학술지(정기간행물)] - Zhou Y / 2009 / High-indexcontrast grating (HCG) and its applications in optoelectronic devices / IEEE J. Sel. Top. Quantum Electron 15 : 1485 ~ 1499
[학술지(정기간행물)] - D. Fattal / 2010 / Flat dielectric grating reflectors with focusing abilities / Nat. Photon 4 : 466 ~ 470
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UCI(KEPA) : I410-ECN-0101-2019-420-001275855